Search results for "Pulvérisation cathodique à courant continue"

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Growth of metal/oxide periodic multilayer : relation between structure and electrical behaviour in systems based on titanium and tungsten

2014

Periodic multilayers have found many applications in the fields of optics, mechanics or electronics. However, few studies focus on the electrical responses of the metal/oxide periodic structures versus temperature. The interest of this work was focused on the characterization of the multilayers and their electrical properties versus temperature. In TiO/Ti/TiO/TiO2 and WO/W/WO/WO3 systems produced by the reactive gas pulsing process, sample structures were established by transmission electron microscopy for sublayers thicknesses between 1.3 and 50.8 nm. Then, this study highlights a modification of conventional electrical behavior versus temperature. An empirical relationship was established…

TitaniumMetal/oxide multilayersElectrical resistivityMicroscopie électronique en TransmissionMulticouches métal/oxydeTungstenTitane[PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci][PHYS.PHYS.PHYS-CHEM-PH] Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph]Résistivité électriquePulvérisation cathodique à courant continueTungstèneTransmission Electron MicroscopyDC magnetron sputtering
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